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NAGASEP gas separation membrane for semiconductors

Silicone hollow fiber membranes that contribute to the stable supply of pure water, controlling dissolved gases in degassing and aeration applications.

In the semiconductor manufacturing industry, quality control of ultra-pure water used in the manufacturing process is extremely important for the stable supply of high-quality products. Gas components such as dissolved oxygen and carbon dioxide in ultra-pure water can lead to impacts on processes and fluctuations in resistivity, potentially affecting product quality and yield. NAGASEP gas separation membranes are utilized for the degassing of ultra-pure water and control of resistivity, contributing to the stabilization of water quality and improvement of quality in semiconductor manufacturing. 【Application Scenarios】 - Degassing of ultra-pure water in the semiconductor manufacturing process - Removal of various gases dissolved in the solution - Control of resistivity through the aeration of carbon dioxide into ultra-pure water 【Effects of Implementation】 - Improved yield through stable supply of ultra-pure water - Stabilization of product quality - Increased efficiency of the manufacturing process

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  • Other separation and analysis equipment
  • Deaeration device
  • Gas Supply Separation Unit

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